I. Application
LPCVD Diffusion Quartz Tube can be used in semiconductor LPCVD to make gaseous compounds react and deposit on the substrate surface to form stable solid films under low pressure by heating. LPCVD is used to deposit Poly-Si, Si3N4, SiO2, phosphor-silicon glass, boron-phosphor-silicon glass, amorphous silicon and refractory metal silicides and other thin films.
II. Product Feature
LPCVD Quartz Tube features high purity, low hydroxyl and high temperature resistance, etc.
III. Product Type
PQ181E 、PQ181E H、PQ181E-R、PQ181EH-R
IV．Typical Size
|
OD Range |
OD Tolerance |
WT Tolerance |
Sliding |
Ovality |
Bow |
|
OD＜100.00 |
±1.00 |
±10.00% |
15.00% |
1.00% |
0.10% |
|
100.00≤OD＜200.00 |
±1.00 |
±10.00% |
15.00% |
1.00% |
0.10% |
|
200.00≤OD＜300.00 |
±1.00 |
±10.00% |
15.00% |
1.00% |
0.10% |
|
300.00≤OD＜400.00 |
±1.00 |
±10.00% |
15.00% |
1.00% |
0.10% |
|
400.00≤OD＜500.00 |
±1.00 |
±10.00% |
15.00% |
1.00% |
0.10% |
|
500.00≤OD＜900.00 |
±2.00 |
±10.00% |
15.00% |
1.00% |
0.10% |
V．Physical & Chemical properties
i. Trace elements Unit：ppm
|
Code |
Criteria |
Al |
Ca |
Cr |
Cu |
Fe |
K |
Li |
Mg |
Mn |
Na |
Ti |
Zr |
|
PQ181E PQ181E-R |
Typical |
13 |
0.5 |
<0.05 |
<0.05 |
0.1 |
0.1 |
0.3 |
0.05 |
0.05 |
0.1 |
1.3 |
1 |
|
Maximum |
19 |
1 |
0.1 |
0.1 |
0.5 |
1 |
1 |
0.2 |
0.2 |
1 |
2 |
2 |
|
|
PQ181EH PQ181EH-R |
Typical |
8 |
0.6 |
<0.05 |
<0.01 |
0.1 |
0.1 |
0.2 |
0.05 |
0.05 |
0.1 |
1.3 |
1 |
|
Maximum |
10 |
1 |
0.1 |
<0.01 |
0.5 |
0.5 |
0.5 |
0.2 |
0.2 |
0.5 |
2 |
2 |
Note: PQ181E-R/PQ181EH-R is semiconductor grade resized tube.
ii. OH Content
|
PQ181E/ PQ181EH |
OH＜10ppm |
PQ181E-R/ PQ181EH-R |
OH＜30ppm |
iii. Physical properties
|
Item |
Index Value |
|
Density（g/cm3） |
2.2 |
|
Heat Conductivity（w/m·k，1000℃） |
2.28 |
|
Coefficient of Thermal Expansion（℃-1，1000℃） |
5.5×10-7 |
|
Softening Point（℃） |
1670 |
|
Annealing Point（℃） |
1210 |
|
Strain Point（℃） |
1110 |
iv. Coefficient of Thermal Expansion & Viscosity
OUR MAIN RRODUCT
MAIN APPLICATION
COMPANY ADVANTAGE
□ ISO9001, ISO14001 certified
□Product has been certified TEL, LAM, AMAT ;
□Located in quartz hometown of China
□Purity of SiO2 can reach to 99.995-99.999%
□Full quartz products, supply for lighting, solar, optics, optical fiber, semiconductor and etc.
□World top famous brand
CNAS CERTIFIED LABORATORY
PRODUCTION MAIN FACILITIES
FAQ:
1.Would you have a discount if l have a large order?
A:Yes we could offer different discount according to your order quantity.
2.Which field are your products applied to?
Our products are widely used into semiconductor,solar,lighting, optical fiber,etc.
3.Do you accept custom design on size?
A:Yes, if the size is reasonable
4.Could you print our company LOGO on the nameplate and package?
A:Yes, we can do that
5.f l don't know what kind of the product I need, what should I do?
A: Just take it easy,you just need to provide us "working pressure","temperature" and "media."Then, we can suggest the most suitable product to you,or we provide you our e-catalogue for your reference,you choose the suitable model,you only need to tell us the model number.
6.What is your MOQ? Can I mix different styles to a start order?
A: Please tell us what products you need first.Like compression fittings, the MOQ is 2pcs.But we can provide any stock as samples for you to check the quality first.
7.If l have a product wants to be made in other special material, can you do it?
A:Of course, you just need to provide us designed drawings or sample and R&D department will estimate that whether we can do or not, we will give you the most satisfactory reply.
Customers Visiting & Exhibition Moment :
