I. Application
It is produced with high purity quartz sand by oxy-hydrogen flame fusion process. It is applied as basic high quality quartz material in semiconductor applications.
II. Characteristics
Semiconductor flame fused ingot feature superior purity and can meet different optical requirements.
III. Code
PQ870、PQ871E
IV．Typical Size Unit：mm
Diameter | Height |
100-800 | 100-2000 |
V．Physicochemical properties
i. Trace element Unit：ppm
Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
PQ870 | Typical | 0.09 | 0.02 | <0.01 | <0.01 | 0.02 | 0.02 | <0.01 | 0.02 | <0.01 | 0.02 | 0.05 | <0.01 |
PQ871E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 |
ii.OH Content
PQ870、PQ871E | OH≈200ppm |
iii. Physicochemical properties
Item | Index Value |
Density（g/cm3） | 2.2 |
Heat Conductivity（w/m·k，1000℃） | 2.28 |
Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
Softening Point（℃） | 1670 |
Annealing Point（℃） | 1210 |
Strain Point（℃） | 1110 |
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