Application
Semiconductor grade quartz cylinder is used as the base material of quartz ring in semiconductor etching process.
Characteristics
Semiconductor grade quartz cylinder features high purity, micro bubble free, low hydroxyl, etc.
Code
PQ100E, PQ100EH
Specifications (Unit: mm)
OD Range | ID Range |
300-350 | 210-240 |
350-400 | 240-300 |
400-450 | 330-350 |
Physicochemical Properties
1) Trace Elements(Unit：ppm)
Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
PQ100E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
PQ100EH | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
2) OH Content
PQ100E/ PQ100EH | OH＜110ppm |
3) Physical Properties
| Item | Index |
Density（g/cm3） | 2.2 |
Heat Conductivity（w/m·k，1000℃） | 2.28 |
Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
Softening Point（℃） | 1670 |
Annealing Point（℃） | 1210 |
Strain Point（℃） | 1110 |
4) Coefficient of Thermal Expansion & Viscosity
Our Main Product
Main Application
Company Advantage
● Full quartz solutions applied to lighting, solar, optics, optical fiber, semiconductor and etc;
● Own of important National patents and core technologies;
● Purity of SiO2 can reach to 99.995-99.999%;
● Cutting edge of melting technology;
CNAS Certified Laboratory
Production Main Facilities
FAQ
Q1. How can I get a sample to check your quality?
A: After price confirmation, you can require for samples to check our quality.
Q2. Which payment form you can accept?
A: T/T
Q3. Can I request to advance the shipment?
A: We can discuss with other customers and try to move up earlier.
Q4. Which shipping way can you provide?
A:We can provide shipping by sea, by air and by express.
Q5. What’s your after-sale service?
A: Our quality warranty period is one year. Any quality problem will be solved to customer satisfactions. Details please check with our sales for different types.
Customers Visiting & Exhibition Moment
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