Application
Semiconductor grade quartz tube is widely used in the oxidation and diffusion process in semiconductor wafer manufacturing.
Product Feature
Semiconductor grade quartz tube features high purity, low hydroxyl and high temperature resistance, etc.
Product Type
PQ181E , PQ181EH, PQ181E-R, PQ181EH-R
Typical Size
OD Range (mm) | OD Tolerance | WT Tolerance | Sliding | Ovality | Bow |
OD＜100.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
100.00≤OD＜200.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
200.00≤OD＜300.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
300.00≤OD＜400.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
400.00≤OD＜500.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
500.00≤OD＜900.00 | ±2.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
Physical & Chemical Properties
1) Trace Elements (Unit：ppm)
Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
PQ181E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
PQ181EH | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
Note: PQ181E-R/PQ181EH-R is semiconductor grade resized tube.
2) OH Content
PQ181E/ PQ181EH | OH＜10ppm | PQ181E-R/ PQ181EH-R | OH＜30ppm |
3) Physical Properties
Item | Index Value |
Density（g/cm3） | 2.2 |
Heat Conductivity（w/m·k，1000℃） | 2.28 |
Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
Softening Point（℃） | 1670 |
Annealing Point（℃） | 1210 |
Strain Point（℃） | 1110 |
4) Coefficient of Thermal Expansion & Viscosity
Our Main Product
Main Application
Company Advantage
● Product has been certified TEL, LAM, AMAT;
● Located in quartz hometown of China;
● Purity of SiO2 can reach to 99.995-99.999%;
● Full quartz products, supply for lighting, solar, optics, optical fiber, semiconductor and etc;
CNAS Certified Laboratory
Production Main Facilities
FAQ
Q1. Which field are your products applied to?
A: Our products are widely used into semiconductor,solar,lighting, optical fiber,etc.
Q2. Could you print our company LOGO on the package?
A: Yes, we can do that.
Q3. What is your MOQ? Can I mix different styles to a start order?
A: Please tell us what products you need first.
Q4. Can you give me a discount?
A: Discount is available,but we have to see the real quantity,we have different price based on different quantity,how much discounts is determined by the quantity,moreover,our price is very competitive in the field.
Q5. Can l visit your factory?
A: Our factory is 500KM far from Shanghai, you can arrive at our factory by high-speed train, it is very convenient.
Customers Visiting & Exhibition Moment
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