Application
As thermal insulation material,this new composite quartz glass is used in wafer manufacturing process.
Characteristics
As a new composite material,the middle of PQ1652E is high purity white opaque quartz material PQ052E which risk of opaque material particle shedding in high temperature zone.The composite layer is fused together without holes so it has remarkable hot and cold working properties.Compared with PQ1652E,PQ1652EH has lower all content and alkali metal content.
Typical Product size (Unit):mm
|
Max Size |
|||
|
Shape |
Length/OD |
Width |
Thickness |
|
Square Plate |
368 |
368 |
3.5-6 |
|
Rectangular Plate |
550 |
368 |
3.5-6 |
|
Disc |
365 |
一 |
3.5-6 |
Physical &Chemical Properties
|
Trace Elements |
(Unit) ppm |
|||
|
Code |
Criteria |
Al Ca Cr Cu Fe K Li Mg Na Ni |
||
|
PQ1652E |
Typical |
13.0 0.80 <0.05 <0.05 0.30 0.50 0.30 0.10 0.80 <0.05 |
||
|
Maximum |
20.0 1.50 0.10 0.10 0.50 1.00 1.00 0.50 2.00 0.10 |
|||
|
Typical |
8.00 0.60 <0.05 <0.05 0.20 0.20 0.20 0.20 0.50 <0.05 |
|||
|
PQ1652EH |
Maximum |
10.0 1.00 0.10 0.10 0.50 0.50 0.50 0.20 1.50 0.10 |
||
Optical Transmission Of Composite Quartz Glass
Wavelength(nm)
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