Application
Semiconductor grade opaque quartz ingot is a kind of basic material of thermal insulation quartz components. It's usually applied for oxidation, diffusion and CVD batch furnace processing.
Characteristics
Semiconductor grade opaque quartz ingot has high purity, great thermal insulation and remarkable heat resistance.
Typical Product size (Unit):mm
|
OD Range |
Height Range |
|
100-800 |
100-800 |
Physical &Chemical Properties
|
Code |
Criteria |
Al |
Ca |
Cr Cu Fe Li |
Mg |
Na |
Ti |
Zr Ni |
|
PQ872E |
Typical |
13.0 |
0.60<0.05<0.050.200.400.60 |
0.10 |
0.50 |
1.30 |
1.00<0.05 |
|
|
Maximum |
19.0 |
1.00 |
0.10 0.10 0.50 1.00 1.00 |
0.20 |
1.00 |
2.00 |
2.00 0.10 |
|
|
PQ872EH |
Typical |
8.00 |
0.60 |
<0.05<0.01 0.10 0.100.20 |
0.05 |
0.10 |
1.30 |
1.00<0.05 |
|
Maximum |
10.0 |
1.00 |
0.10 <0.01 0.50 0.500.50 |
0.20 |
0.50 |
2.00 |
2.00 0.10 |
Physical Properties
|
ltems |
PQ872E |
P0872EH |
|
Density(g/cm³) |
2.0 |
2.0 |
|
Bore Size(um) |
≈50 |
≈50 |
|
Heat Conductivity(w/m.k,20℃) |
1.24 |
1.24 |
|
Permittivity(500MHZ,20℃) |
3.7 |
3.7 |
|
Annealing Point(C) |
1180 |
1180 |
|
Strain Point(C) |
1070 |
1070 |
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